9/26/2010	10:44:38 AM	Recipe started at 10:44 AM
9/26/2010	10:44:38 AM	Helium valve closed
9/26/2010	10:44:38 AM	BCl3 valve closed
9/26/2010	10:44:38 AM	PH3 valve closed
9/26/2010	10:44:38 AM	SiCl4 pre valve closed
9/26/2010	10:44:38 AM	SiCl4 post valve closed
9/26/2010	10:44:38 AM	Main Vac valve closed
9/26/2010	10:44:38 AM	Bypass valve closed
9/26/2010	10:44:38 AM	Bubbler valve closed
9/26/2010	10:44:38 AM	H2 valve opened
9/26/2010	10:44:38 AM	Helium MFC set to  0.000000
9/26/2010	10:44:38 AM	H2 MFC set to  500.000000
9/26/2010	10:44:38 AM	BCl3 MFC set to  0.000000
9/26/2010	10:44:38 AM	PHl3 MFC set to  0.000000
9/26/2010	10:44:38 AM	SiCl4 MFC set to  0.000000
9/26/2010	10:44:38 AM	Bypass solenoid MFC set to  0.000000
9/26/2010	10:44:38 AM	Tube furnace set to 0
9/26/2010	10:46:01 AM	Helium valve closed
9/26/2010	10:46:01 AM	BCl3 valve closed
9/26/2010	10:46:01 AM	PH3 valve closed
9/26/2010	10:46:01 AM	SiCl4 pre valve closed
9/26/2010	10:46:01 AM	SiCl4 post valve closed
9/26/2010	10:46:01 AM	Main Vac valve closed
9/26/2010	10:46:01 AM	Bypass valve closed
9/26/2010	10:46:01 AM	H2 valve opened
9/26/2010	10:46:01 AM	Bubbler valve opened
9/26/2010	10:46:01 AM	Helium MFC set to  0.000000
9/26/2010	10:46:01 AM	H2 MFC set to  500.000000
9/26/2010	10:46:01 AM	BCl3 MFC set to  0.000000
9/26/2010	10:46:01 AM	PHl3 MFC set to  0.000000
9/26/2010	10:46:01 AM	SiCl4 MFC set to  0.000000
9/26/2010	10:46:01 AM	Bypass solenoid MFC set to  0.000000
9/26/2010	10:46:01 AM	Tube furnace set to 1000
9/26/2010	11:06:01 AM	Helium valve closed
9/26/2010	11:06:01 AM	PH3 valve closed
9/26/2010	11:06:01 AM	Main Vac valve closed
9/26/2010	11:06:01 AM	Bypass valve closed
9/26/2010	11:06:01 AM	H2 valve opened
9/26/2010	11:06:01 AM	BCl3 valve opened
9/26/2010	11:06:01 AM	SiCl4 pre valve opened
9/26/2010	11:06:01 AM	SiCl4 post valve opened
9/26/2010	11:06:01 AM	Bubbler valve opened
9/26/2010	11:06:01 AM	Helium MFC set to  0.000000
9/26/2010	11:06:01 AM	H2 MFC set to  500.000000
9/26/2010	11:06:01 AM	BCl3 MFC set to  5.000000
9/26/2010	11:06:01 AM	PHl3 MFC set to  0.000000
9/26/2010	11:06:01 AM	SiCl4 MFC set to  50.000000
9/26/2010	11:06:01 AM	Bypass solenoid MFC set to  0.000000
9/26/2010	11:06:01 AM	Tube furnace set to 1000
9/26/2010	11:21:01 AM	H2 valve closed
9/26/2010	11:21:01 AM	BCl3 valve closed
9/26/2010	11:21:01 AM	PH3 valve closed
9/26/2010	11:21:01 AM	SiCl4 pre valve closed
9/26/2010	11:21:01 AM	SiCl4 post valve closed
9/26/2010	11:21:01 AM	Main Vac valve closed
9/26/2010	11:21:01 AM	Bypass valve closed
9/26/2010	11:21:01 AM	Helium valve opened
9/26/2010	11:21:01 AM	Bubbler valve opened
9/26/2010	11:21:01 AM	Helium MFC set to  500.000000
9/26/2010	11:21:01 AM	H2 MFC set to  0.000000
9/26/2010	11:21:01 AM	BCl3 MFC set to  0.000000
9/26/2010	11:21:01 AM	PHl3 MFC set to  0.000000
9/26/2010	11:21:01 AM	SiCl4 MFC set to  0.000000
9/26/2010	11:21:01 AM	Bypass solenoid MFC set to  0.000000
9/26/2010	11:21:01 AM	Tube furnace set to 0
9/26/2010	11:41:01 AM	Helium valve closed
9/26/2010	11:41:01 AM	H2 valve closed
9/26/2010	11:41:01 AM	BCl3 valve closed
9/26/2010	11:41:01 AM	PH3 valve closed
9/26/2010	11:41:01 AM	SiCl4 pre valve closed
9/26/2010	11:41:01 AM	SiCl4 post valve closed
9/26/2010	11:41:01 AM	Main Vac valve closed
9/26/2010	11:41:01 AM	Bypass valve closed
9/26/2010	11:41:01 AM	Bubbler valve closed
9/26/2010	11:41:01 AM	Helium MFC set to  0.000000
9/26/2010	11:41:01 AM	H2 MFC set to  0.000000
9/26/2010	11:41:01 AM	BCl3 MFC set to  0.000000
9/26/2010	11:41:01 AM	PHl3 MFC set to  0.000000
9/26/2010	11:41:01 AM	SiCl4 MFC set to  0.000000
9/26/2010	11:41:01 AM	Bypass solenoid MFC set to  0.000000
9/26/2010	11:41:01 AM	Tube furnace set to 0
9/26/2010	11:41:02 AM	Run finished at 11:41 AM
9/26/2010	1:21:16 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
9/26/2010	1:21:17 PM	Recipe started at 1:21 PM
9/26/2010	1:21:17 PM	H2 valve closed
9/26/2010	1:21:17 PM	BCl3 valve closed
9/26/2010	1:21:17 PM	PH3 valve closed
9/26/2010	1:21:17 PM	SiCl4 pre valve closed
9/26/2010	1:21:17 PM	SiCl4 post valve closed
9/26/2010	1:21:17 PM	Main Vac valve closed
9/26/2010	1:21:17 PM	Bypass valve closed
9/26/2010	1:21:17 PM	Bubbler valve closed
9/26/2010	1:21:17 PM	Helium valve opened
9/26/2010	1:21:17 PM	Helium MFC set to  500.000000
9/26/2010	1:21:17 PM	H2 MFC set to  0.000000
9/26/2010	1:21:17 PM	BCl3 MFC set to  0.000000
9/26/2010	1:21:17 PM	PHl3 MFC set to  0.000000
9/26/2010	1:21:17 PM	SiCl4 MFC set to  0.000000
9/26/2010	1:21:17 PM	Bypass solenoid MFC set to  0.000000
9/26/2010	1:21:17 PM	Tube furnace set to 0
9/26/2010	1:21:22 PM	Helium valve closed
9/26/2010	1:21:22 PM	H2 valve closed
9/26/2010	1:21:22 PM	BCl3 valve closed
9/26/2010	1:21:22 PM	PH3 valve closed
9/26/2010	1:21:22 PM	SiCl4 pre valve closed
9/26/2010	1:21:22 PM	SiCl4 post valve closed
9/26/2010	1:21:22 PM	Main Vac valve closed
9/26/2010	1:21:22 PM	Bypass valve closed
9/26/2010	1:21:22 PM	Bubbler valve closed
9/26/2010	1:21:22 PM	Helium MFC set to  0.000000
9/26/2010	1:21:22 PM	H2 MFC set to  0.000000
9/26/2010	1:21:22 PM	BCl3 MFC set to  0.000000
9/26/2010	1:21:22 PM	PHl3 MFC set to  0.000000
9/26/2010	1:21:22 PM	SiCl4 MFC set to  0.000000
9/26/2010	1:21:22 PM	Bypass solenoid MFC set to  0.000000
9/26/2010	1:21:22 PM	Tube furnace set to 0
9/26/2010	1:21:23 PM	Run finished at 1:21 PM
9/26/2010	1:21:23 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
9/26/2010	1:29:00 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
9/26/2010	1:29:01 PM	Recipe started at 1:29 PM
9/26/2010	1:29:01 PM	Helium valve closed
9/26/2010	1:29:01 PM	H2 valve closed
9/26/2010	1:29:01 PM	BCl3 valve closed
9/26/2010	1:29:01 PM	PH3 valve closed
9/26/2010	1:29:01 PM	SiCl4 pre valve closed
9/26/2010	1:29:01 PM	SiCl4 post valve closed
9/26/2010	1:29:01 PM	Main Vac valve closed
9/26/2010	1:29:01 PM	Bubbler valve closed
9/26/2010	1:29:01 PM	Bypass valve opened
9/26/2010	1:29:01 PM	Helium MFC set to  0.000000
9/26/2010	1:29:01 PM	H2 MFC set to  0.000000
9/26/2010	1:29:01 PM	BCl3 MFC set to  0.000000
9/26/2010	1:29:01 PM	PHl3 MFC set to  0.000000
9/26/2010	1:29:01 PM	SiCl4 MFC set to  0.000000
9/26/2010	1:29:01 PM	Bypass solenoid MFC set to  0.000000
9/26/2010	1:29:01 PM	Tube furnace set to 0
9/26/2010	1:29:43 PM	Helium valve closed
9/26/2010	1:29:43 PM	H2 valve closed
9/26/2010	1:29:43 PM	BCl3 valve closed
9/26/2010	1:29:43 PM	PH3 valve closed
9/26/2010	1:29:43 PM	SiCl4 pre valve closed
9/26/2010	1:29:43 PM	SiCl4 post valve closed
9/26/2010	1:29:43 PM	Bubbler valve closed
9/26/2010	1:29:43 PM	Main Vac valve opened
9/26/2010	1:29:43 PM	Bypass valve opened
9/26/2010	1:29:43 PM	Helium MFC set to  0.000000
9/26/2010	1:29:43 PM	H2 MFC set to  0.000000
9/26/2010	1:29:43 PM	BCl3 MFC set to  0.000000
9/26/2010	1:29:43 PM	PHl3 MFC set to  0.000000
9/26/2010	1:29:43 PM	SiCl4 MFC set to  0.000000
9/26/2010	1:29:43 PM	Bypass solenoid MFC set to  0.000000
9/26/2010	1:29:43 PM	Tube furnace set to 0
9/26/2010	1:29:44 PM	Run finished at 1:29 PM
9/26/2010	1:29:44 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
9/26/2010	1:30:08 PM	Recipe started at 1:30 PM
9/26/2010	1:30:08 PM	Helium valve closed
9/26/2010	1:30:08 PM	H2 valve closed
9/26/2010	1:30:08 PM	BCl3 valve closed
9/26/2010	1:30:08 PM	PH3 valve closed
9/26/2010	1:30:08 PM	SiCl4 pre valve closed
9/26/2010	1:30:08 PM	SiCl4 post valve closed
9/26/2010	1:30:08 PM	Main Vac valve closed
9/26/2010	1:30:08 PM	Bubbler valve closed
9/26/2010	1:30:08 PM	Bypass valve opened
9/26/2010	1:30:08 PM	Helium MFC set to  0.000000
9/26/2010	1:30:08 PM	H2 MFC set to  0.000000
9/26/2010	1:30:08 PM	BCl3 MFC set to  0.000000
9/26/2010	1:30:08 PM	PHl3 MFC set to  0.000000
9/26/2010	1:30:08 PM	SiCl4 MFC set to  0.000000
9/26/2010	1:30:08 PM	Bypass solenoid MFC set to  0.000000
9/26/2010	1:30:08 PM	Tube furnace set to 0
9/26/2010	1:30:08 PM	Helium valve closed
9/26/2010	1:30:08 PM	H2 valve closed
9/26/2010	1:30:08 PM	BCl3 valve closed
9/26/2010	1:30:08 PM	PH3 valve closed
9/26/2010	1:30:08 PM	SiCl4 pre valve closed
9/26/2010	1:30:08 PM	SiCl4 post valve closed
9/26/2010	1:30:08 PM	Bubbler valve closed
9/26/2010	1:30:08 PM	Main Vac valve opened
9/26/2010	1:30:08 PM	Bypass valve opened
9/26/2010	1:30:08 PM	Helium MFC set to  0.000000
9/26/2010	1:30:08 PM	H2 MFC set to  0.000000
9/26/2010	1:30:08 PM	BCl3 MFC set to  0.000000
9/26/2010	1:30:08 PM	PHl3 MFC set to  0.000000
9/26/2010	1:30:08 PM	SiCl4 MFC set to  0.000000
9/26/2010	1:30:08 PM	Bypass solenoid MFC set to  0.000000
9/26/2010	1:30:08 PM	Tube furnace set to 0
9/26/2010	1:30:10 PM	H2 valve closed
9/26/2010	1:30:10 PM	BCl3 valve closed
9/26/2010	1:30:10 PM	PH3 valve closed
9/26/2010	1:30:10 PM	SiCl4 pre valve closed
9/26/2010	1:30:10 PM	SiCl4 post valve closed
9/26/2010	1:30:10 PM	Bubbler valve closed
9/26/2010	1:30:10 PM	Helium valve opened
9/26/2010	1:30:10 PM	Main Vac valve opened
9/26/2010	1:30:10 PM	Bypass valve opened
9/26/2010	1:30:10 PM	Helium MFC set to  100.000000
9/26/2010	1:30:10 PM	H2 MFC set to  0.000000
9/26/2010	1:30:10 PM	BCl3 MFC set to  0.000000
9/26/2010	1:30:10 PM	PHl3 MFC set to  0.000000
9/26/2010	1:30:10 PM	SiCl4 MFC set to  0.000000
9/26/2010	1:30:10 PM	Bypass solenoid MFC set to  0.000000
9/26/2010	1:30:10 PM	Tube furnace set to 0
9/26/2010	1:30:11 PM	Helium valve closed
9/26/2010	1:30:11 PM	H2 valve closed
9/26/2010	1:30:11 PM	BCl3 valve closed
9/26/2010	1:30:11 PM	PH3 valve closed
9/26/2010	1:30:11 PM	SiCl4 pre valve closed
9/26/2010	1:30:11 PM	SiCl4 post valve closed
9/26/2010	1:30:11 PM	Bubbler valve closed
9/26/2010	1:30:11 PM	Main Vac valve opened
9/26/2010	1:30:11 PM	Bypass valve opened
9/26/2010	1:30:11 PM	Helium MFC set to  0.000000
9/26/2010	1:30:11 PM	H2 MFC set to  0.000000
9/26/2010	1:30:11 PM	BCl3 MFC set to  0.000000
9/26/2010	1:30:11 PM	PHl3 MFC set to  0.000000
9/26/2010	1:30:11 PM	SiCl4 MFC set to  0.000000
9/26/2010	1:30:11 PM	Bypass solenoid MFC set to  0.000000
9/26/2010	1:30:11 PM	Tube furnace set to 0
9/26/2010	1:30:19 PM	H2 valve closed
9/26/2010	1:30:19 PM	BCl3 valve closed
9/26/2010	1:30:19 PM	PH3 valve closed
9/26/2010	1:30:19 PM	SiCl4 pre valve closed
9/26/2010	1:30:19 PM	SiCl4 post valve closed
9/26/2010	1:30:19 PM	Bubbler valve closed
9/26/2010	1:30:19 PM	Helium valve opened
9/26/2010	1:30:19 PM	Main Vac valve opened
9/26/2010	1:30:19 PM	Bypass valve opened
9/26/2010	1:30:19 PM	Helium MFC set to  100.000000
9/26/2010	1:30:19 PM	H2 MFC set to  0.000000
9/26/2010	1:30:19 PM	BCl3 MFC set to  0.000000
9/26/2010	1:30:19 PM	PHl3 MFC set to  0.000000
9/26/2010	1:30:19 PM	SiCl4 MFC set to  0.000000
9/26/2010	1:30:19 PM	Bypass solenoid MFC set to  0.000000
9/26/2010	1:30:19 PM	Tube furnace set to 0
9/26/2010	1:30:20 PM	Helium valve closed
9/26/2010	1:30:20 PM	H2 valve closed
9/26/2010	1:30:20 PM	BCl3 valve closed
9/26/2010	1:30:20 PM	PH3 valve closed
9/26/2010	1:30:20 PM	SiCl4 pre valve closed
9/26/2010	1:30:20 PM	SiCl4 post valve closed
9/26/2010	1:30:20 PM	Bubbler valve closed
9/26/2010	1:30:20 PM	Main Vac valve opened
9/26/2010	1:30:20 PM	Bypass valve opened
9/26/2010	1:30:20 PM	Helium MFC set to  0.000000
9/26/2010	1:30:20 PM	H2 MFC set to  0.000000
9/26/2010	1:30:20 PM	BCl3 MFC set to  0.000000
9/26/2010	1:30:20 PM	PHl3 MFC set to  0.000000
9/26/2010	1:30:20 PM	SiCl4 MFC set to  0.000000
9/26/2010	1:30:20 PM	Bypass solenoid MFC set to  0.000000
9/26/2010	1:30:20 PM	Tube furnace set to 0
9/26/2010	1:31:20 PM	H2 valve closed
9/26/2010	1:31:20 PM	BCl3 valve closed
9/26/2010	1:31:20 PM	PH3 valve closed
9/26/2010	1:31:20 PM	SiCl4 pre valve closed
9/26/2010	1:31:20 PM	SiCl4 post valve closed
9/26/2010	1:31:20 PM	Bubbler valve closed
9/26/2010	1:31:20 PM	Helium valve opened
9/26/2010	1:31:20 PM	Main Vac valve opened
9/26/2010	1:31:20 PM	Bypass valve opened
9/26/2010	1:31:20 PM	Helium MFC set to  100.000000
9/26/2010	1:31:20 PM	H2 MFC set to  0.000000
9/26/2010	1:31:20 PM	BCl3 MFC set to  0.000000
9/26/2010	1:31:20 PM	PHl3 MFC set to  0.000000
9/26/2010	1:31:20 PM	SiCl4 MFC set to  0.000000
9/26/2010	1:31:20 PM	Bypass solenoid MFC set to  0.000000
9/26/2010	1:31:20 PM	Tube furnace set to 0
9/26/2010	1:40:20 PM	Helium valve closed
9/26/2010	1:40:20 PM	H2 valve closed
9/26/2010	1:40:20 PM	BCl3 valve closed
9/26/2010	1:40:20 PM	PH3 valve closed
9/26/2010	1:40:20 PM	SiCl4 pre valve closed
9/26/2010	1:40:20 PM	SiCl4 post valve closed
9/26/2010	1:40:20 PM	Bubbler valve closed
9/26/2010	1:40:20 PM	Main Vac valve opened
9/26/2010	1:40:20 PM	Bypass valve opened
9/26/2010	1:40:20 PM	Helium MFC set to  0.000000
9/26/2010	1:40:20 PM	H2 MFC set to  0.000000
9/26/2010	1:40:20 PM	BCl3 MFC set to  0.000000
9/26/2010	1:40:20 PM	PHl3 MFC set to  0.000000
9/26/2010	1:40:20 PM	SiCl4 MFC set to  0.000000
9/26/2010	1:40:20 PM	Bypass solenoid MFC set to  0.000000
9/26/2010	1:40:20 PM	Tube furnace set to 0
9/26/2010	1:41:20 PM	H2 valve closed
9/26/2010	1:41:20 PM	BCl3 valve closed
9/26/2010	1:41:20 PM	PH3 valve closed
9/26/2010	1:41:20 PM	SiCl4 pre valve closed
9/26/2010	1:41:20 PM	SiCl4 post valve closed
9/26/2010	1:41:20 PM	Bubbler valve closed
9/26/2010	1:41:20 PM	Helium valve opened
9/26/2010	1:41:20 PM	Main Vac valve opened
9/26/2010	1:41:20 PM	Bypass valve opened
9/26/2010	1:41:20 PM	Helium MFC set to  100.000000
9/26/2010	1:41:20 PM	H2 MFC set to  0.000000
9/26/2010	1:41:20 PM	BCl3 MFC set to  0.000000
9/26/2010	1:41:20 PM	PHl3 MFC set to  0.000000
9/26/2010	1:41:20 PM	SiCl4 MFC set to  0.000000
9/26/2010	1:41:20 PM	Bypass solenoid MFC set to  0.000000
9/26/2010	1:41:20 PM	Tube furnace set to 0
9/26/2010	1:50:20 PM	Helium valve closed
9/26/2010	1:50:20 PM	H2 valve closed
9/26/2010	1:50:20 PM	BCl3 valve closed
9/26/2010	1:50:20 PM	PH3 valve closed
9/26/2010	1:50:20 PM	SiCl4 pre valve closed
9/26/2010	1:50:20 PM	SiCl4 post valve closed
9/26/2010	1:50:20 PM	Bubbler valve closed
9/26/2010	1:50:20 PM	Main Vac valve opened
9/26/2010	1:50:20 PM	Bypass valve opened
9/26/2010	1:50:20 PM	Helium MFC set to  0.000000
9/26/2010	1:50:20 PM	H2 MFC set to  0.000000
9/26/2010	1:50:20 PM	BCl3 MFC set to  0.000000
9/26/2010	1:50:20 PM	PHl3 MFC set to  0.000000
9/26/2010	1:50:20 PM	SiCl4 MFC set to  0.000000
9/26/2010	1:50:20 PM	Bypass solenoid MFC set to  0.000000
9/26/2010	1:50:21 PM	Tube furnace set to 0
9/26/2010	1:51:21 PM	H2 valve closed
9/26/2010	1:51:21 PM	BCl3 valve closed
9/26/2010	1:51:21 PM	PH3 valve closed
9/26/2010	1:51:21 PM	SiCl4 pre valve closed
9/26/2010	1:51:21 PM	SiCl4 post valve closed
9/26/2010	1:51:21 PM	Bubbler valve closed
9/26/2010	1:51:21 PM	Helium valve opened
9/26/2010	1:51:21 PM	Main Vac valve opened
9/26/2010	1:51:21 PM	Bypass valve opened
9/26/2010	1:51:21 PM	Helium MFC set to  100.000000
9/26/2010	1:51:21 PM	H2 MFC set to  0.000000
9/26/2010	1:51:21 PM	BCl3 MFC set to  0.000000
9/26/2010	1:51:21 PM	PHl3 MFC set to  0.000000
9/26/2010	1:51:21 PM	SiCl4 MFC set to  0.000000
9/26/2010	1:51:21 PM	Bypass solenoid MFC set to  0.000000
9/26/2010	1:51:21 PM	Tube furnace set to 0
9/26/2010	2:00:21 PM	Helium valve closed
9/26/2010	2:00:21 PM	H2 valve closed
9/26/2010	2:00:21 PM	BCl3 valve closed
9/26/2010	2:00:21 PM	PH3 valve closed
9/26/2010	2:00:21 PM	SiCl4 pre valve closed
9/26/2010	2:00:21 PM	SiCl4 post valve closed
9/26/2010	2:00:21 PM	Bubbler valve closed
9/26/2010	2:00:21 PM	Main Vac valve opened
9/26/2010	2:00:21 PM	Bypass valve opened
9/26/2010	2:00:21 PM	Helium MFC set to  0.000000
9/26/2010	2:00:21 PM	H2 MFC set to  0.000000
9/26/2010	2:00:21 PM	BCl3 MFC set to  0.000000
9/26/2010	2:00:21 PM	PHl3 MFC set to  0.000000
9/26/2010	2:00:21 PM	SiCl4 MFC set to  0.000000
9/26/2010	2:00:21 PM	Bypass solenoid MFC set to  0.000000
9/26/2010	2:00:21 PM	Tube furnace set to 0
9/26/2010	2:00:22 PM	Run finished at 2:00 PM
9/26/2010	2:24:55 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
9/26/2010	2:24:55 PM	Recipe started at 2:24 PM
9/26/2010	2:24:55 PM	Helium valve closed
9/26/2010	2:24:55 PM	H2 valve closed
9/26/2010	2:24:55 PM	BCl3 valve closed
9/26/2010	2:24:55 PM	PH3 valve closed
9/26/2010	2:24:55 PM	SiCl4 pre valve closed
9/26/2010	2:24:55 PM	SiCl4 post valve closed
9/26/2010	2:24:55 PM	Main Vac valve closed
9/26/2010	2:24:55 PM	Bypass valve closed
9/26/2010	2:24:55 PM	Bubbler valve closed
9/26/2010	2:24:55 PM	Helium MFC set to  0.000000
9/26/2010	2:24:55 PM	H2 MFC set to  0.000000
9/26/2010	2:24:55 PM	BCl3 MFC set to  0.000000
9/26/2010	2:24:55 PM	PHl3 MFC set to  0.000000
9/26/2010	2:24:55 PM	SiCl4 MFC set to  0.000000
9/26/2010	2:24:55 PM	Bypass solenoid MFC set to  0.000000
9/26/2010	2:24:55 PM	Tube furnace set to 0
9/26/2010	2:24:56 PM	Run finished at 2:24 PM
9/26/2010	2:24:56 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
9/26/2010	2:25:05 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
9/26/2010	2:25:06 PM	Recipe started at 2:25 PM
9/26/2010	2:25:06 PM	Helium valve closed
9/26/2010	2:25:06 PM	H2 valve closed
9/26/2010	2:25:06 PM	BCl3 valve closed
9/26/2010	2:25:06 PM	PH3 valve closed
9/26/2010	2:25:06 PM	SiCl4 pre valve closed
9/26/2010	2:25:06 PM	SiCl4 post valve closed
9/26/2010	2:25:06 PM	Main Vac valve closed
9/26/2010	2:25:06 PM	Bubbler valve closed
9/26/2010	2:25:06 PM	Bypass valve opened
9/26/2010	2:25:06 PM	Helium MFC set to  0.000000
9/26/2010	2:25:06 PM	H2 MFC set to  0.000000
9/26/2010	2:25:06 PM	BCl3 MFC set to  0.000000
9/26/2010	2:25:06 PM	PHl3 MFC set to  0.000000
9/26/2010	2:25:06 PM	SiCl4 MFC set to  0.000000
9/26/2010	2:25:06 PM	Bypass solenoid MFC set to  0.000000
9/26/2010	2:25:06 PM	Tube furnace set to 0
9/26/2010	2:25:06 PM	Helium valve closed
9/26/2010	2:25:06 PM	H2 valve closed
9/26/2010	2:25:06 PM	BCl3 valve closed
9/26/2010	2:25:06 PM	PH3 valve closed
9/26/2010	2:25:06 PM	SiCl4 pre valve closed
9/26/2010	2:25:06 PM	SiCl4 post valve closed
9/26/2010	2:25:06 PM	Bubbler valve closed
9/26/2010	2:25:06 PM	Main Vac valve opened
9/26/2010	2:25:06 PM	Bypass valve opened
9/26/2010	2:25:06 PM	Helium MFC set to  0.000000
9/26/2010	2:25:06 PM	H2 MFC set to  0.000000
9/26/2010	2:25:06 PM	BCl3 MFC set to  0.000000
9/26/2010	2:25:06 PM	PHl3 MFC set to  0.000000
9/26/2010	2:25:06 PM	SiCl4 MFC set to  0.000000
9/26/2010	2:25:06 PM	Bypass solenoid MFC set to  0.000000
9/26/2010	2:25:06 PM	Tube furnace set to 0
9/26/2010	2:25:06 PM	Run finished at 2:25 PM
9/26/2010	2:25:06 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
9/26/2010	2:38:11 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
9/26/2010	2:38:11 PM	Recipe started at 2:38 PM
9/26/2010	2:38:11 PM	Helium valve closed
9/26/2010	2:38:11 PM	H2 valve closed
9/26/2010	2:38:11 PM	BCl3 valve closed
9/26/2010	2:38:11 PM	PH3 valve closed
9/26/2010	2:38:11 PM	SiCl4 pre valve closed
9/26/2010	2:38:11 PM	SiCl4 post valve closed
9/26/2010	2:38:11 PM	Main Vac valve closed
9/26/2010	2:38:11 PM	Bypass valve closed
9/26/2010	2:38:11 PM	Bubbler valve closed
9/26/2010	2:38:11 PM	Helium MFC set to  0.000000
9/26/2010	2:38:11 PM	H2 MFC set to  0.000000
9/26/2010	2:38:11 PM	BCl3 MFC set to  0.000000
9/26/2010	2:38:11 PM	PHl3 MFC set to  0.000000
9/26/2010	2:38:11 PM	SiCl4 MFC set to  0.000000
9/26/2010	2:38:11 PM	Bypass solenoid MFC set to  0.000000
9/26/2010	2:38:11 PM	Tube furnace set to 0
9/26/2010	2:38:12 PM	Run finished at 2:38 PM
9/26/2010	2:38:12 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
9/26/2010	2:38:20 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
9/26/2010	2:38:21 PM	Recipe started at 2:38 PM
9/26/2010	2:38:21 PM	Helium valve closed
9/26/2010	2:38:21 PM	H2 valve closed
9/26/2010	2:38:21 PM	BCl3 valve closed
9/26/2010	2:38:21 PM	PH3 valve closed
9/26/2010	2:38:21 PM	SiCl4 pre valve closed
9/26/2010	2:38:21 PM	SiCl4 post valve closed
9/26/2010	2:38:21 PM	Main Vac valve closed
9/26/2010	2:38:21 PM	Bubbler valve closed
9/26/2010	2:38:21 PM	Bypass valve opened
9/26/2010	2:38:21 PM	Helium MFC set to  0.000000
9/26/2010	2:38:21 PM	H2 MFC set to  0.000000
9/26/2010	2:38:21 PM	BCl3 MFC set to  0.000000
9/26/2010	2:38:21 PM	PHl3 MFC set to  0.000000
9/26/2010	2:38:21 PM	SiCl4 MFC set to  0.000000
9/26/2010	2:38:21 PM	Bypass solenoid MFC set to  0.000000
9/26/2010	2:38:21 PM	Tube furnace set to 0
9/26/2010	2:38:22 PM	Helium valve closed
9/26/2010	2:38:22 PM	H2 valve closed
9/26/2010	2:38:22 PM	BCl3 valve closed
9/26/2010	2:38:22 PM	PH3 valve closed
9/26/2010	2:38:22 PM	SiCl4 pre valve closed
9/26/2010	2:38:22 PM	SiCl4 post valve closed
9/26/2010	2:38:22 PM	Bubbler valve closed
9/26/2010	2:38:22 PM	Main Vac valve opened
9/26/2010	2:38:22 PM	Bypass valve opened
9/26/2010	2:38:22 PM	Helium MFC set to  0.000000
9/26/2010	2:38:22 PM	H2 MFC set to  0.000000
9/26/2010	2:38:22 PM	BCl3 MFC set to  0.000000
9/26/2010	2:38:22 PM	PHl3 MFC set to  0.000000
9/26/2010	2:38:22 PM	SiCl4 MFC set to  0.000000
9/26/2010	2:38:22 PM	Bypass solenoid MFC set to  0.000000
9/26/2010	2:38:22 PM	Tube furnace set to 0
9/26/2010	2:38:22 PM	Run finished at 2:38 PM
9/26/2010	2:38:22 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
9/26/2010	2:38:28 PM	Recipe started at 2:38 PM
9/26/2010	2:38:28 PM	Helium valve closed
9/26/2010	2:38:28 PM	BCl3 valve closed
9/26/2010	2:38:28 PM	PH3 valve closed
9/26/2010	2:38:28 PM	SiCl4 pre valve closed
9/26/2010	2:38:28 PM	SiCl4 post valve closed
9/26/2010	2:38:28 PM	Main Vac valve closed
9/26/2010	2:38:28 PM	Bypass valve closed
9/26/2010	2:38:28 PM	Bubbler valve closed
9/26/2010	2:38:28 PM	H2 valve opened
9/26/2010	2:38:28 PM	Helium MFC set to  0.000000
9/26/2010	2:38:28 PM	H2 MFC set to  500.000000
9/26/2010	2:38:28 PM	BCl3 MFC set to  0.000000
9/26/2010	2:38:28 PM	PHl3 MFC set to  0.000000
9/26/2010	2:38:28 PM	SiCl4 MFC set to  0.000000
9/26/2010	2:38:28 PM	Bypass solenoid MFC set to  0.000000
9/26/2010	2:38:28 PM	Tube furnace set to 0
9/26/2010	2:39:49 PM	Helium valve closed
9/26/2010	2:39:49 PM	BCl3 valve closed
9/26/2010	2:39:49 PM	PH3 valve closed
9/26/2010	2:39:49 PM	SiCl4 pre valve closed
9/26/2010	2:39:49 PM	SiCl4 post valve closed
9/26/2010	2:39:49 PM	Main Vac valve closed
9/26/2010	2:39:49 PM	Bypass valve closed
9/26/2010	2:39:49 PM	H2 valve opened
9/26/2010	2:39:49 PM	Bubbler valve opened
9/26/2010	2:39:49 PM	Helium MFC set to  0.000000
9/26/2010	2:39:49 PM	H2 MFC set to  500.000000
9/26/2010	2:39:49 PM	BCl3 MFC set to  0.000000
9/26/2010	2:39:49 PM	PHl3 MFC set to  0.000000
9/26/2010	2:39:49 PM	SiCl4 MFC set to  0.000000
9/26/2010	2:39:49 PM	Bypass solenoid MFC set to  0.000000
9/26/2010	2:39:49 PM	Tube furnace set to 1000
9/26/2010	2:59:49 PM	Helium valve closed
9/26/2010	2:59:49 PM	PH3 valve closed
9/26/2010	2:59:49 PM	Main Vac valve closed
9/26/2010	2:59:49 PM	Bypass valve closed
9/26/2010	2:59:49 PM	H2 valve opened
9/26/2010	2:59:49 PM	BCl3 valve opened
9/26/2010	2:59:49 PM	SiCl4 pre valve opened
9/26/2010	2:59:49 PM	SiCl4 post valve opened
9/26/2010	2:59:49 PM	Bubbler valve opened
9/26/2010	2:59:49 PM	Helium MFC set to  0.000000
9/26/2010	2:59:49 PM	H2 MFC set to  500.000000
9/26/2010	2:59:49 PM	BCl3 MFC set to  5.000000
9/26/2010	2:59:49 PM	PHl3 MFC set to  0.000000
9/26/2010	2:59:49 PM	SiCl4 MFC set to  50.000000
9/26/2010	2:59:49 PM	Bypass solenoid MFC set to  0.000000
9/26/2010	2:59:49 PM	Tube furnace set to 1000
9/26/2010	3:14:49 PM	H2 valve closed
9/26/2010	3:14:49 PM	BCl3 valve closed
9/26/2010	3:14:49 PM	PH3 valve closed
9/26/2010	3:14:49 PM	SiCl4 pre valve closed
9/26/2010	3:14:49 PM	SiCl4 post valve closed
9/26/2010	3:14:49 PM	Main Vac valve closed
9/26/2010	3:14:49 PM	Bypass valve closed
9/26/2010	3:14:49 PM	Helium valve opened
9/26/2010	3:14:49 PM	Bubbler valve opened
9/26/2010	3:14:49 PM	Helium MFC set to  500.000000
9/26/2010	3:14:49 PM	H2 MFC set to  0.000000
9/26/2010	3:14:49 PM	BCl3 MFC set to  0.000000
9/26/2010	3:14:49 PM	PHl3 MFC set to  0.000000
9/26/2010	3:14:49 PM	SiCl4 MFC set to  0.000000
9/26/2010	3:14:49 PM	Bypass solenoid MFC set to  0.000000
9/26/2010	3:14:49 PM	Tube furnace set to 0
9/26/2010	3:34:49 PM	Helium valve closed
9/26/2010	3:34:49 PM	H2 valve closed
9/26/2010	3:34:49 PM	BCl3 valve closed
9/26/2010	3:34:49 PM	PH3 valve closed
9/26/2010	3:34:49 PM	SiCl4 pre valve closed
9/26/2010	3:34:49 PM	SiCl4 post valve closed
9/26/2010	3:34:49 PM	Main Vac valve closed
9/26/2010	3:34:49 PM	Bypass valve closed
9/26/2010	3:34:49 PM	Bubbler valve closed
9/26/2010	3:34:49 PM	Helium MFC set to  0.000000
9/26/2010	3:34:49 PM	H2 MFC set to  0.000000
9/26/2010	3:34:49 PM	BCl3 MFC set to  0.000000
9/26/2010	3:34:49 PM	PHl3 MFC set to  0.000000
9/26/2010	3:34:49 PM	SiCl4 MFC set to  0.000000
9/26/2010	3:34:49 PM	Bypass solenoid MFC set to  0.000000
9/26/2010	3:34:50 PM	Tube furnace set to 0
9/26/2010	3:34:50 PM	Run finished at 3:34 PM
9/26/2010	3:45:35 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
9/26/2010	3:45:36 PM	Recipe started at 3:45 PM
9/26/2010	3:45:36 PM	Helium valve closed
9/26/2010	3:45:36 PM	H2 valve closed
9/26/2010	3:45:36 PM	BCl3 valve closed
9/26/2010	3:45:36 PM	PH3 valve closed
9/26/2010	3:45:36 PM	SiCl4 pre valve closed
9/26/2010	3:45:36 PM	SiCl4 post valve closed
9/26/2010	3:45:36 PM	Main Vac valve closed
9/26/2010	3:45:36 PM	Bubbler valve closed
9/26/2010	3:45:36 PM	Bypass valve opened
9/26/2010	3:45:36 PM	Helium MFC set to  0.000000
9/26/2010	3:45:36 PM	H2 MFC set to  0.000000
9/26/2010	3:45:36 PM	BCl3 MFC set to  0.000000
9/26/2010	3:45:36 PM	PHl3 MFC set to  0.000000
9/26/2010	3:45:36 PM	SiCl4 MFC set to  0.000000
9/26/2010	3:45:36 PM	Bypass solenoid MFC set to  0.000000
9/26/2010	3:45:36 PM	Tube furnace set to 0
9/26/2010	3:46:17 PM	Helium valve closed
9/26/2010	3:46:17 PM	H2 valve closed
9/26/2010	3:46:17 PM	BCl3 valve closed
9/26/2010	3:46:17 PM	PH3 valve closed
9/26/2010	3:46:17 PM	SiCl4 pre valve closed
9/26/2010	3:46:17 PM	SiCl4 post valve closed
9/26/2010	3:46:17 PM	Bubbler valve closed
9/26/2010	3:46:17 PM	Main Vac valve opened
9/26/2010	3:46:17 PM	Bypass valve opened
9/26/2010	3:46:17 PM	Helium MFC set to  0.000000
9/26/2010	3:46:17 PM	H2 MFC set to  0.000000
9/26/2010	3:46:17 PM	BCl3 MFC set to  0.000000
9/26/2010	3:46:17 PM	PHl3 MFC set to  0.000000
9/26/2010	3:46:17 PM	SiCl4 MFC set to  0.000000
9/26/2010	3:46:17 PM	Bypass solenoid MFC set to  0.000000
9/26/2010	3:46:17 PM	Tube furnace set to 0
9/26/2010	3:46:18 PM	Run finished at 3:46 PM
9/26/2010	3:46:18 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
9/26/2010	3:46:29 PM	Recipe started at 3:46 PM
9/26/2010	3:46:29 PM	Helium valve closed
9/26/2010	3:46:29 PM	H2 valve closed
9/26/2010	3:46:29 PM	BCl3 valve closed
9/26/2010	3:46:29 PM	PH3 valve closed
9/26/2010	3:46:29 PM	SiCl4 pre valve closed
9/26/2010	3:46:29 PM	SiCl4 post valve closed
9/26/2010	3:46:29 PM	Main Vac valve closed
9/26/2010	3:46:29 PM	Bubbler valve closed
9/26/2010	3:46:29 PM	Bypass valve opened
9/26/2010	3:46:29 PM	Helium MFC set to  0.000000
9/26/2010	3:46:29 PM	H2 MFC set to  0.000000
9/26/2010	3:46:29 PM	BCl3 MFC set to  0.000000
9/26/2010	3:46:29 PM	PHl3 MFC set to  0.000000
9/26/2010	3:46:29 PM	SiCl4 MFC set to  0.000000
9/26/2010	3:46:29 PM	Bypass solenoid MFC set to  0.000000
9/26/2010	3:46:29 PM	Tube furnace set to 0
9/26/2010	3:46:30 PM	Helium valve closed
9/26/2010	3:46:30 PM	H2 valve closed
9/26/2010	3:46:30 PM	BCl3 valve closed
9/26/2010	3:46:30 PM	PH3 valve closed
9/26/2010	3:46:30 PM	SiCl4 pre valve closed
9/26/2010	3:46:30 PM	SiCl4 post valve closed
9/26/2010	3:46:30 PM	Bubbler valve closed
9/26/2010	3:46:30 PM	Main Vac valve opened
9/26/2010	3:46:30 PM	Bypass valve opened
9/26/2010	3:46:30 PM	Helium MFC set to  0.000000
9/26/2010	3:46:30 PM	H2 MFC set to  0.000000
9/26/2010	3:46:30 PM	BCl3 MFC set to  0.000000
9/26/2010	3:46:30 PM	PHl3 MFC set to  0.000000
9/26/2010	3:46:30 PM	SiCl4 MFC set to  0.000000
9/26/2010	3:46:30 PM	Bypass solenoid MFC set to  0.000000
9/26/2010	3:46:30 PM	Tube furnace set to 0
9/26/2010	3:46:31 PM	H2 valve closed
9/26/2010	3:46:31 PM	BCl3 valve closed
9/26/2010	3:46:31 PM	PH3 valve closed
9/26/2010	3:46:31 PM	SiCl4 pre valve closed
9/26/2010	3:46:31 PM	SiCl4 post valve closed
9/26/2010	3:46:31 PM	Bubbler valve closed
9/26/2010	3:46:31 PM	Helium valve opened
9/26/2010	3:46:31 PM	Main Vac valve opened
9/26/2010	3:46:31 PM	Bypass valve opened
9/26/2010	3:46:31 PM	Helium MFC set to  100.000000
9/26/2010	3:46:31 PM	H2 MFC set to  0.000000
9/26/2010	3:46:31 PM	BCl3 MFC set to  0.000000
9/26/2010	3:46:31 PM	PHl3 MFC set to  0.000000
9/26/2010	3:46:31 PM	SiCl4 MFC set to  0.000000
9/26/2010	3:46:31 PM	Bypass solenoid MFC set to  0.000000
9/26/2010	3:46:31 PM	Tube furnace set to 0
9/26/2010	3:46:32 PM	Helium valve closed
9/26/2010	3:46:32 PM	H2 valve closed
9/26/2010	3:46:32 PM	BCl3 valve closed
9/26/2010	3:46:32 PM	PH3 valve closed
9/26/2010	3:46:32 PM	SiCl4 pre valve closed
9/26/2010	3:46:32 PM	SiCl4 post valve closed
9/26/2010	3:46:32 PM	Bubbler valve closed
9/26/2010	3:46:32 PM	Main Vac valve opened
9/26/2010	3:46:32 PM	Bypass valve opened
9/26/2010	3:46:32 PM	Helium MFC set to  0.000000
9/26/2010	3:46:32 PM	H2 MFC set to  0.000000
9/26/2010	3:46:32 PM	BCl3 MFC set to  0.000000
9/26/2010	3:46:32 PM	PHl3 MFC set to  0.000000
9/26/2010	3:46:32 PM	SiCl4 MFC set to  0.000000
9/26/2010	3:46:32 PM	Bypass solenoid MFC set to  0.000000
9/26/2010	3:46:32 PM	Tube furnace set to 0
9/26/2010	3:46:33 PM	H2 valve closed
9/26/2010	3:46:33 PM	BCl3 valve closed
9/26/2010	3:46:33 PM	PH3 valve closed
9/26/2010	3:46:33 PM	SiCl4 pre valve closed
9/26/2010	3:46:33 PM	SiCl4 post valve closed
9/26/2010	3:46:33 PM	Bubbler valve closed
9/26/2010	3:46:33 PM	Helium valve opened
9/26/2010	3:46:33 PM	Main Vac valve opened
9/26/2010	3:46:33 PM	Bypass valve opened
9/26/2010	3:46:33 PM	Helium MFC set to  100.000000
9/26/2010	3:46:33 PM	H2 MFC set to  0.000000
9/26/2010	3:46:33 PM	BCl3 MFC set to  0.000000
9/26/2010	3:46:33 PM	PHl3 MFC set to  0.000000
9/26/2010	3:46:33 PM	SiCl4 MFC set to  0.000000
9/26/2010	3:46:33 PM	Bypass solenoid MFC set to  0.000000
9/26/2010	3:46:33 PM	Tube furnace set to 0
9/26/2010	3:46:33 PM	Helium valve closed
9/26/2010	3:46:33 PM	H2 valve closed
9/26/2010	3:46:33 PM	BCl3 valve closed
9/26/2010	3:46:33 PM	PH3 valve closed
9/26/2010	3:46:33 PM	SiCl4 pre valve closed
9/26/2010	3:46:33 PM	SiCl4 post valve closed
9/26/2010	3:46:33 PM	Bubbler valve closed
9/26/2010	3:46:33 PM	Main Vac valve opened
9/26/2010	3:46:33 PM	Bypass valve opened
9/26/2010	3:46:33 PM	Helium MFC set to  0.000000
9/26/2010	3:46:33 PM	H2 MFC set to  0.000000
9/26/2010	3:46:33 PM	BCl3 MFC set to  0.000000
9/26/2010	3:46:33 PM	PHl3 MFC set to  0.000000
9/26/2010	3:46:33 PM	SiCl4 MFC set to  0.000000
9/26/2010	3:46:33 PM	Bypass solenoid MFC set to  0.000000
9/26/2010	3:46:33 PM	Tube furnace set to 0
9/26/2010	3:47:33 PM	H2 valve closed
9/26/2010	3:47:33 PM	BCl3 valve closed
9/26/2010	3:47:33 PM	PH3 valve closed
9/26/2010	3:47:33 PM	SiCl4 pre valve closed
9/26/2010	3:47:33 PM	SiCl4 post valve closed
9/26/2010	3:47:33 PM	Bubbler valve closed
9/26/2010	3:47:33 PM	Helium valve opened
9/26/2010	3:47:33 PM	Main Vac valve opened
9/26/2010	3:47:33 PM	Bypass valve opened
9/26/2010	3:47:34 PM	Helium MFC set to  100.000000
9/26/2010	3:47:34 PM	H2 MFC set to  0.000000
9/26/2010	3:47:34 PM	BCl3 MFC set to  0.000000
9/26/2010	3:47:34 PM	PHl3 MFC set to  0.000000
9/26/2010	3:47:34 PM	SiCl4 MFC set to  0.000000
9/26/2010	3:47:34 PM	Bypass solenoid MFC set to  0.000000
9/26/2010	3:47:34 PM	Tube furnace set to 0
9/26/2010	3:56:34 PM	Helium valve closed
9/26/2010	3:56:34 PM	H2 valve closed
9/26/2010	3:56:34 PM	BCl3 valve closed
9/26/2010	3:56:34 PM	PH3 valve closed
9/26/2010	3:56:34 PM	SiCl4 pre valve closed
9/26/2010	3:56:34 PM	SiCl4 post valve closed
9/26/2010	3:56:34 PM	Bubbler valve closed
9/26/2010	3:56:34 PM	Main Vac valve opened
9/26/2010	3:56:34 PM	Bypass valve opened
9/26/2010	3:56:34 PM	Helium MFC set to  0.000000
9/26/2010	3:56:34 PM	H2 MFC set to  0.000000
9/26/2010	3:56:34 PM	BCl3 MFC set to  0.000000
9/26/2010	3:56:34 PM	PHl3 MFC set to  0.000000
9/26/2010	3:56:34 PM	SiCl4 MFC set to  0.000000
9/26/2010	3:56:34 PM	Bypass solenoid MFC set to  0.000000
9/26/2010	3:56:34 PM	Tube furnace set to 0
9/26/2010	3:57:34 PM	H2 valve closed
9/26/2010	3:57:34 PM	BCl3 valve closed
9/26/2010	3:57:34 PM	PH3 valve closed
9/26/2010	3:57:34 PM	SiCl4 pre valve closed
9/26/2010	3:57:34 PM	SiCl4 post valve closed
9/26/2010	3:57:34 PM	Bubbler valve closed
9/26/2010	3:57:34 PM	Helium valve opened
9/26/2010	3:57:34 PM	Main Vac valve opened
9/26/2010	3:57:34 PM	Bypass valve opened
9/26/2010	3:57:34 PM	Helium MFC set to  100.000000
9/26/2010	3:57:34 PM	H2 MFC set to  0.000000
9/26/2010	3:57:34 PM	BCl3 MFC set to  0.000000
9/26/2010	3:57:34 PM	PHl3 MFC set to  0.000000
9/26/2010	3:57:34 PM	SiCl4 MFC set to  0.000000
9/26/2010	3:57:34 PM	Bypass solenoid MFC set to  0.000000
9/26/2010	3:57:34 PM	Tube furnace set to 0
9/26/2010	4:06:34 PM	Helium valve closed
9/26/2010	4:06:34 PM	H2 valve closed
9/26/2010	4:06:34 PM	BCl3 valve closed
9/26/2010	4:06:34 PM	PH3 valve closed
9/26/2010	4:06:34 PM	SiCl4 pre valve closed
9/26/2010	4:06:34 PM	SiCl4 post valve closed
9/26/2010	4:06:34 PM	Bubbler valve closed
9/26/2010	4:06:34 PM	Main Vac valve opened
9/26/2010	4:06:34 PM	Bypass valve opened
9/26/2010	4:06:34 PM	Helium MFC set to  0.000000
9/26/2010	4:06:34 PM	H2 MFC set to  0.000000
9/26/2010	4:06:34 PM	BCl3 MFC set to  0.000000
9/26/2010	4:06:34 PM	PHl3 MFC set to  0.000000
9/26/2010	4:06:34 PM	SiCl4 MFC set to  0.000000
9/26/2010	4:06:34 PM	Bypass solenoid MFC set to  0.000000
9/26/2010	4:06:34 PM	Tube furnace set to 0
9/26/2010	4:07:34 PM	H2 valve closed
9/26/2010	4:07:34 PM	BCl3 valve closed
9/26/2010	4:07:34 PM	PH3 valve closed
9/26/2010	4:07:34 PM	SiCl4 pre valve closed
9/26/2010	4:07:34 PM	SiCl4 post valve closed
9/26/2010	4:07:34 PM	Bubbler valve closed
9/26/2010	4:07:34 PM	Helium valve opened
9/26/2010	4:07:34 PM	Main Vac valve opened
9/26/2010	4:07:34 PM	Bypass valve opened
9/26/2010	4:07:34 PM	Helium MFC set to  100.000000
9/26/2010	4:07:34 PM	H2 MFC set to  0.000000
9/26/2010	4:07:34 PM	BCl3 MFC set to  0.000000
9/26/2010	4:07:34 PM	PHl3 MFC set to  0.000000
9/26/2010	4:07:34 PM	SiCl4 MFC set to  0.000000
9/26/2010	4:07:34 PM	Bypass solenoid MFC set to  0.000000
9/26/2010	4:07:34 PM	Tube furnace set to 0
9/26/2010	4:16:34 PM	Helium valve closed
9/26/2010	4:16:34 PM	H2 valve closed
9/26/2010	4:16:34 PM	BCl3 valve closed
9/26/2010	4:16:34 PM	PH3 valve closed
9/26/2010	4:16:34 PM	SiCl4 pre valve closed
9/26/2010	4:16:34 PM	SiCl4 post valve closed
9/26/2010	4:16:34 PM	Bubbler valve closed
9/26/2010	4:16:34 PM	Main Vac valve opened
9/26/2010	4:16:34 PM	Bypass valve opened
9/26/2010	4:16:34 PM	Helium MFC set to  0.000000
9/26/2010	4:16:34 PM	H2 MFC set to  0.000000
9/26/2010	4:16:34 PM	BCl3 MFC set to  0.000000
9/26/2010	4:16:34 PM	PHl3 MFC set to  0.000000
9/26/2010	4:16:34 PM	SiCl4 MFC set to  0.000000
9/26/2010	4:16:34 PM	Bypass solenoid MFC set to  0.000000
9/26/2010	4:16:35 PM	Tube furnace set to 0
9/26/2010	4:16:36 PM	Run finished at 4:16 PM
9/26/2010	5:31:52 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
9/26/2010	5:31:53 PM	Recipe started at 5:31 PM
9/26/2010	5:31:53 PM	Helium valve closed
9/26/2010	5:31:53 PM	H2 valve closed
9/26/2010	5:31:53 PM	BCl3 valve closed
9/26/2010	5:31:53 PM	PH3 valve closed
9/26/2010	5:31:53 PM	SiCl4 pre valve closed
9/26/2010	5:31:53 PM	SiCl4 post valve closed
9/26/2010	5:31:53 PM	Main Vac valve closed
9/26/2010	5:31:53 PM	Bypass valve closed
9/26/2010	5:31:53 PM	Bubbler valve closed
9/26/2010	5:31:53 PM	Helium MFC set to  0.000000
9/26/2010	5:31:53 PM	H2 MFC set to  0.000000
9/26/2010	5:31:53 PM	BCl3 MFC set to  0.000000
9/26/2010	5:31:53 PM	PHl3 MFC set to  0.000000
9/26/2010	5:31:53 PM	SiCl4 MFC set to  0.000000
9/26/2010	5:31:53 PM	Bypass solenoid MFC set to  0.000000
9/26/2010	5:31:53 PM	Tube furnace set to 0
9/26/2010	5:31:53 PM	Run finished at 5:31 PM
9/26/2010	5:31:53 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
9/26/2010	5:32:02 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
9/26/2010	5:32:03 PM	Recipe started at 5:32 PM
9/26/2010	5:32:03 PM	Helium valve closed
9/26/2010	5:32:03 PM	H2 valve closed
9/26/2010	5:32:03 PM	BCl3 valve closed
9/26/2010	5:32:03 PM	PH3 valve closed
9/26/2010	5:32:03 PM	SiCl4 pre valve closed
9/26/2010	5:32:03 PM	SiCl4 post valve closed
9/26/2010	5:32:03 PM	Main Vac valve closed
9/26/2010	5:32:03 PM	Bubbler valve closed
9/26/2010	5:32:03 PM	Bypass valve opened
9/26/2010	5:32:03 PM	Helium MFC set to  0.000000
9/26/2010	5:32:03 PM	H2 MFC set to  0.000000
9/26/2010	5:32:03 PM	BCl3 MFC set to  0.000000
9/26/2010	5:32:03 PM	PHl3 MFC set to  0.000000
9/26/2010	5:32:03 PM	SiCl4 MFC set to  0.000000
9/26/2010	5:32:03 PM	Bypass solenoid MFC set to  0.000000
9/26/2010	5:32:03 PM	Tube furnace set to 0
9/26/2010	5:32:03 PM	Helium valve closed
9/26/2010	5:32:03 PM	H2 valve closed
9/26/2010	5:32:03 PM	BCl3 valve closed
9/26/2010	5:32:03 PM	PH3 valve closed
9/26/2010	5:32:03 PM	SiCl4 pre valve closed
9/26/2010	5:32:03 PM	SiCl4 post valve closed
9/26/2010	5:32:03 PM	Bubbler valve closed
9/26/2010	5:32:03 PM	Main Vac valve opened
9/26/2010	5:32:03 PM	Bypass valve opened
9/26/2010	5:32:03 PM	Helium MFC set to  0.000000
9/26/2010	5:32:03 PM	H2 MFC set to  0.000000
9/26/2010	5:32:03 PM	BCl3 MFC set to  0.000000
9/26/2010	5:32:03 PM	PHl3 MFC set to  0.000000
9/26/2010	5:32:03 PM	SiCl4 MFC set to  0.000000
9/26/2010	5:32:03 PM	Bypass solenoid MFC set to  0.000000
9/26/2010	5:32:03 PM	Tube furnace set to 0
9/26/2010	5:32:03 PM	Run finished at 5:32 PM
9/26/2010	5:32:03 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
9/26/2010	5:33:02 PM	Recipe started at 5:33 PM
9/26/2010	5:33:02 PM	Helium valve closed
9/26/2010	5:33:02 PM	BCl3 valve closed
9/26/2010	5:33:02 PM	PH3 valve closed
9/26/2010	5:33:02 PM	SiCl4 pre valve closed
9/26/2010	5:33:02 PM	SiCl4 post valve closed
9/26/2010	5:33:02 PM	Main Vac valve closed
9/26/2010	5:33:02 PM	Bypass valve closed
9/26/2010	5:33:02 PM	Bubbler valve closed
9/26/2010	5:33:02 PM	H2 valve opened
9/26/2010	5:33:02 PM	Helium MFC set to  0.000000
9/26/2010	5:33:02 PM	H2 MFC set to  500.000000
9/26/2010	5:33:02 PM	BCl3 MFC set to  0.000000
9/26/2010	5:33:02 PM	PHl3 MFC set to  0.000000
9/26/2010	5:33:02 PM	SiCl4 MFC set to  0.000000
9/26/2010	5:33:02 PM	Bypass solenoid MFC set to  0.000000
9/26/2010	5:33:03 PM	Tube furnace set to 0
9/26/2010	5:34:22 PM	Helium valve closed
9/26/2010	5:34:22 PM	BCl3 valve closed
9/26/2010	5:34:22 PM	PH3 valve closed
9/26/2010	5:34:22 PM	SiCl4 pre valve closed
9/26/2010	5:34:22 PM	SiCl4 post valve closed
9/26/2010	5:34:22 PM	Main Vac valve closed
9/26/2010	5:34:22 PM	Bypass valve closed
9/26/2010	5:34:22 PM	H2 valve opened
9/26/2010	5:34:22 PM	Bubbler valve opened
9/26/2010	5:34:22 PM	Helium MFC set to  0.000000
9/26/2010	5:34:22 PM	H2 MFC set to  500.000000
9/26/2010	5:34:22 PM	BCl3 MFC set to  0.000000
9/26/2010	5:34:22 PM	PHl3 MFC set to  0.000000
9/26/2010	5:34:22 PM	SiCl4 MFC set to  0.000000
9/26/2010	5:34:22 PM	Bypass solenoid MFC set to  0.000000
9/26/2010	5:34:22 PM	Tube furnace set to 1000
9/26/2010	5:54:22 PM	Helium valve closed
9/26/2010	5:54:22 PM	PH3 valve closed
9/26/2010	5:54:22 PM	Main Vac valve closed
9/26/2010	5:54:22 PM	Bypass valve closed
9/26/2010	5:54:22 PM	H2 valve opened
9/26/2010	5:54:22 PM	BCl3 valve opened
9/26/2010	5:54:22 PM	SiCl4 pre valve opened
9/26/2010	5:54:22 PM	SiCl4 post valve opened
9/26/2010	5:54:22 PM	Bubbler valve opened
9/26/2010	5:54:22 PM	Helium MFC set to  0.000000
9/26/2010	5:54:22 PM	H2 MFC set to  500.000000
9/26/2010	5:54:22 PM	BCl3 MFC set to  5.000000
9/26/2010	5:54:22 PM	PHl3 MFC set to  0.000000
9/26/2010	5:54:22 PM	SiCl4 MFC set to  50.000000
9/26/2010	5:54:22 PM	Bypass solenoid MFC set to  0.000000
9/26/2010	5:54:22 PM	Tube furnace set to 1000
9/26/2010	6:09:22 PM	H2 valve closed
9/26/2010	6:09:22 PM	BCl3 valve closed
9/26/2010	6:09:22 PM	PH3 valve closed
9/26/2010	6:09:22 PM	SiCl4 pre valve closed
9/26/2010	6:09:22 PM	SiCl4 post valve closed
9/26/2010	6:09:22 PM	Main Vac valve closed
9/26/2010	6:09:22 PM	Bypass valve closed
9/26/2010	6:09:22 PM	Helium valve opened
9/26/2010	6:09:22 PM	Bubbler valve opened
9/26/2010	6:09:22 PM	Helium MFC set to  500.000000
9/26/2010	6:09:22 PM	H2 MFC set to  0.000000
9/26/2010	6:09:22 PM	BCl3 MFC set to  0.000000
9/26/2010	6:09:22 PM	PHl3 MFC set to  0.000000
9/26/2010	6:09:22 PM	SiCl4 MFC set to  0.000000
9/26/2010	6:09:22 PM	Bypass solenoid MFC set to  0.000000
9/26/2010	6:09:22 PM	Tube furnace set to 0
9/26/2010	6:29:22 PM	Helium valve closed
9/26/2010	6:29:22 PM	H2 valve closed
9/26/2010	6:29:22 PM	BCl3 valve closed
9/26/2010	6:29:22 PM	PH3 valve closed
9/26/2010	6:29:22 PM	SiCl4 pre valve closed
9/26/2010	6:29:22 PM	SiCl4 post valve closed
9/26/2010	6:29:22 PM	Main Vac valve closed
9/26/2010	6:29:22 PM	Bypass valve closed
9/26/2010	6:29:22 PM	Bubbler valve closed
9/26/2010	6:29:22 PM	Helium MFC set to  0.000000
9/26/2010	6:29:22 PM	H2 MFC set to  0.000000
9/26/2010	6:29:22 PM	BCl3 MFC set to  0.000000
9/26/2010	6:29:22 PM	PHl3 MFC set to  0.000000
9/26/2010	6:29:22 PM	SiCl4 MFC set to  0.000000
9/26/2010	6:29:22 PM	Bypass solenoid MFC set to  0.000000
9/26/2010	6:29:22 PM	Tube furnace set to 0
9/26/2010	6:29:23 PM	Run finished at 6:29 PM
9/26/2010	6:41:28 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
9/26/2010	6:41:28 PM	Recipe started at 6:41 PM
9/26/2010	6:41:28 PM	Helium valve closed
9/26/2010	6:41:28 PM	H2 valve closed
9/26/2010	6:41:28 PM	BCl3 valve closed
9/26/2010	6:41:28 PM	PH3 valve closed
9/26/2010	6:41:28 PM	SiCl4 pre valve closed
9/26/2010	6:41:28 PM	SiCl4 post valve closed
9/26/2010	6:41:28 PM	Main Vac valve closed
9/26/2010	6:41:28 PM	Bubbler valve closed
9/26/2010	6:41:28 PM	Bypass valve opened
9/26/2010	6:41:28 PM	Helium MFC set to  0.000000
9/26/2010	6:41:28 PM	H2 MFC set to  0.000000
9/26/2010	6:41:28 PM	BCl3 MFC set to  0.000000
9/26/2010	6:41:28 PM	PHl3 MFC set to  0.000000
9/26/2010	6:41:28 PM	SiCl4 MFC set to  0.000000
9/26/2010	6:41:28 PM	Bypass solenoid MFC set to  0.000000
9/26/2010	6:41:28 PM	Tube furnace set to 0
9/26/2010	6:42:09 PM	Helium valve closed
9/26/2010	6:42:09 PM	H2 valve closed
9/26/2010	6:42:09 PM	BCl3 valve closed
9/26/2010	6:42:09 PM	PH3 valve closed
9/26/2010	6:42:09 PM	SiCl4 pre valve closed
9/26/2010	6:42:09 PM	SiCl4 post valve closed
9/26/2010	6:42:09 PM	Bubbler valve closed
9/26/2010	6:42:09 PM	Main Vac valve opened
9/26/2010	6:42:09 PM	Bypass valve opened
9/26/2010	6:42:09 PM	Helium MFC set to  0.000000
9/26/2010	6:42:09 PM	H2 MFC set to  0.000000
9/26/2010	6:42:09 PM	BCl3 MFC set to  0.000000
9/26/2010	6:42:09 PM	PHl3 MFC set to  0.000000
9/26/2010	6:42:09 PM	SiCl4 MFC set to  0.000000
9/26/2010	6:42:09 PM	Bypass solenoid MFC set to  0.000000
9/26/2010	6:42:10 PM	Tube furnace set to 0
9/26/2010	6:42:10 PM	Run finished at 6:42 PM
9/26/2010	6:42:10 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
9/26/2010	6:43:42 PM	Recipe started at 6:43 PM
9/26/2010	6:43:42 PM	Helium valve closed
9/26/2010	6:43:42 PM	H2 valve closed
9/26/2010	6:43:42 PM	BCl3 valve closed
9/26/2010	6:43:42 PM	PH3 valve closed
9/26/2010	6:43:42 PM	SiCl4 pre valve closed
9/26/2010	6:43:42 PM	SiCl4 post valve closed
9/26/2010	6:43:42 PM	Main Vac valve closed
9/26/2010	6:43:42 PM	Bubbler valve closed
9/26/2010	6:43:42 PM	Bypass valve opened
9/26/2010	6:43:42 PM	Helium MFC set to  0.000000
9/26/2010	6:43:42 PM	H2 MFC set to  0.000000
9/26/2010	6:43:42 PM	BCl3 MFC set to  0.000000
9/26/2010	6:43:42 PM	PHl3 MFC set to  0.000000
9/26/2010	6:43:42 PM	SiCl4 MFC set to  0.000000
9/26/2010	6:43:42 PM	Bypass solenoid MFC set to  0.000000
9/26/2010	6:43:42 PM	Tube furnace set to 0
9/26/2010	6:43:42 PM	Helium valve closed
9/26/2010	6:43:42 PM	H2 valve closed
9/26/2010	6:43:42 PM	BCl3 valve closed
9/26/2010	6:43:42 PM	PH3 valve closed
9/26/2010	6:43:42 PM	SiCl4 pre valve closed
9/26/2010	6:43:42 PM	SiCl4 post valve closed
9/26/2010	6:43:42 PM	Bubbler valve closed
9/26/2010	6:43:42 PM	Main Vac valve opened
9/26/2010	6:43:42 PM	Bypass valve opened
9/26/2010	6:43:42 PM	Helium MFC set to  0.000000
9/26/2010	6:43:42 PM	H2 MFC set to  0.000000
9/26/2010	6:43:42 PM	BCl3 MFC set to  0.000000
9/26/2010	6:43:42 PM	PHl3 MFC set to  0.000000
9/26/2010	6:43:42 PM	SiCl4 MFC set to  0.000000
9/26/2010	6:43:42 PM	Bypass solenoid MFC set to  0.000000
9/26/2010	6:43:42 PM	Tube furnace set to 0
9/26/2010	6:43:43 PM	H2 valve closed
9/26/2010	6:43:43 PM	BCl3 valve closed
9/26/2010	6:43:43 PM	PH3 valve closed
9/26/2010	6:43:43 PM	SiCl4 pre valve closed
9/26/2010	6:43:43 PM	SiCl4 post valve closed
9/26/2010	6:43:43 PM	Bubbler valve closed
9/26/2010	6:43:43 PM	Helium valve opened
9/26/2010	6:43:44 PM	Main Vac valve opened
9/26/2010	6:43:44 PM	Bypass valve opened
9/26/2010	6:43:44 PM	Helium MFC set to  100.000000
9/26/2010	6:43:44 PM	H2 MFC set to  0.000000
9/26/2010	6:43:44 PM	BCl3 MFC set to  0.000000
9/26/2010	6:43:44 PM	PHl3 MFC set to  0.000000
9/26/2010	6:43:44 PM	SiCl4 MFC set to  0.000000
9/26/2010	6:43:44 PM	Bypass solenoid MFC set to  0.000000
9/26/2010	6:43:44 PM	Tube furnace set to 0
9/26/2010	6:43:44 PM	Helium valve closed
9/26/2010	6:43:44 PM	H2 valve closed
9/26/2010	6:43:44 PM	BCl3 valve closed
9/26/2010	6:43:44 PM	PH3 valve closed
9/26/2010	6:43:44 PM	SiCl4 pre valve closed
9/26/2010	6:43:44 PM	SiCl4 post valve closed
9/26/2010	6:43:44 PM	Bubbler valve closed
9/26/2010	6:43:44 PM	Main Vac valve opened
9/26/2010	6:43:44 PM	Bypass valve opened
9/26/2010	6:43:44 PM	Helium MFC set to  0.000000
9/26/2010	6:43:44 PM	H2 MFC set to  0.000000
9/26/2010	6:43:44 PM	BCl3 MFC set to  0.000000
9/26/2010	6:43:44 PM	PHl3 MFC set to  0.000000
9/26/2010	6:43:44 PM	SiCl4 MFC set to  0.000000
9/26/2010	6:43:44 PM	Bypass solenoid MFC set to  0.000000
9/26/2010	6:43:44 PM	Tube furnace set to 0
9/26/2010	6:43:45 PM	H2 valve closed
9/26/2010	6:43:45 PM	BCl3 valve closed
9/26/2010	6:43:45 PM	PH3 valve closed
9/26/2010	6:43:45 PM	SiCl4 pre valve closed
9/26/2010	6:43:45 PM	SiCl4 post valve closed
9/26/2010	6:43:45 PM	Bubbler valve closed
9/26/2010	6:43:45 PM	Helium valve opened
9/26/2010	6:43:45 PM	Main Vac valve opened
9/26/2010	6:43:45 PM	Bypass valve opened
9/26/2010	6:43:45 PM	Helium MFC set to  100.000000
9/26/2010	6:43:45 PM	H2 MFC set to  0.000000
9/26/2010	6:43:45 PM	BCl3 MFC set to  0.000000
9/26/2010	6:43:45 PM	PHl3 MFC set to  0.000000
9/26/2010	6:43:45 PM	SiCl4 MFC set to  0.000000
9/26/2010	6:43:45 PM	Bypass solenoid MFC set to  0.000000
9/26/2010	6:43:45 PM	Tube furnace set to 0
9/26/2010	6:43:46 PM	Helium valve closed
9/26/2010	6:43:46 PM	H2 valve closed
9/26/2010	6:43:46 PM	BCl3 valve closed
9/26/2010	6:43:46 PM	PH3 valve closed
9/26/2010	6:43:46 PM	SiCl4 pre valve closed
9/26/2010	6:43:46 PM	SiCl4 post valve closed
9/26/2010	6:43:46 PM	Bubbler valve closed
9/26/2010	6:43:46 PM	Main Vac valve opened
9/26/2010	6:43:46 PM	Bypass valve opened
9/26/2010	6:43:46 PM	Helium MFC set to  0.000000
9/26/2010	6:43:46 PM	H2 MFC set to  0.000000
9/26/2010	6:43:46 PM	BCl3 MFC set to  0.000000
9/26/2010	6:43:46 PM	PHl3 MFC set to  0.000000
9/26/2010	6:43:46 PM	SiCl4 MFC set to  0.000000
9/26/2010	6:43:46 PM	Bypass solenoid MFC set to  0.000000
9/26/2010	6:43:46 PM	Tube furnace set to 0
9/26/2010	6:44:46 PM	H2 valve closed
9/26/2010	6:44:46 PM	BCl3 valve closed
9/26/2010	6:44:46 PM	PH3 valve closed
9/26/2010	6:44:46 PM	SiCl4 pre valve closed
9/26/2010	6:44:46 PM	SiCl4 post valve closed
9/26/2010	6:44:46 PM	Bubbler valve closed
9/26/2010	6:44:46 PM	Helium valve opened
9/26/2010	6:44:46 PM	Main Vac valve opened
9/26/2010	6:44:46 PM	Bypass valve opened
9/26/2010	6:44:46 PM	Helium MFC set to  100.000000
9/26/2010	6:44:46 PM	H2 MFC set to  0.000000
9/26/2010	6:44:46 PM	BCl3 MFC set to  0.000000
9/26/2010	6:44:46 PM	PHl3 MFC set to  0.000000
9/26/2010	6:44:46 PM	SiCl4 MFC set to  0.000000
9/26/2010	6:44:46 PM	Bypass solenoid MFC set to  0.000000
9/26/2010	6:44:46 PM	Tube furnace set to 0
9/26/2010	6:53:46 PM	Helium valve closed
9/26/2010	6:53:46 PM	H2 valve closed
9/26/2010	6:53:46 PM	BCl3 valve closed
9/26/2010	6:53:46 PM	PH3 valve closed
9/26/2010	6:53:46 PM	SiCl4 pre valve closed
9/26/2010	6:53:46 PM	SiCl4 post valve closed
9/26/2010	6:53:46 PM	Bubbler valve closed
9/26/2010	6:53:46 PM	Main Vac valve opened
9/26/2010	6:53:46 PM	Bypass valve opened
9/26/2010	6:53:46 PM	Helium MFC set to  0.000000
9/26/2010	6:53:46 PM	H2 MFC set to  0.000000
9/26/2010	6:53:46 PM	BCl3 MFC set to  0.000000
9/26/2010	6:53:46 PM	PHl3 MFC set to  0.000000
9/26/2010	6:53:46 PM	SiCl4 MFC set to  0.000000
9/26/2010	6:53:46 PM	Bypass solenoid MFC set to  0.000000
9/26/2010	6:53:46 PM	Tube furnace set to 0
9/26/2010	6:54:46 PM	H2 valve closed
9/26/2010	6:54:46 PM	BCl3 valve closed
9/26/2010	6:54:46 PM	PH3 valve closed
9/26/2010	6:54:46 PM	SiCl4 pre valve closed
9/26/2010	6:54:46 PM	SiCl4 post valve closed
9/26/2010	6:54:46 PM	Bubbler valve closed
9/26/2010	6:54:46 PM	Helium valve opened
9/26/2010	6:54:46 PM	Main Vac valve opened
9/26/2010	6:54:46 PM	Bypass valve opened
9/26/2010	6:54:46 PM	Helium MFC set to  100.000000
9/26/2010	6:54:46 PM	H2 MFC set to  0.000000
9/26/2010	6:54:46 PM	BCl3 MFC set to  0.000000
9/26/2010	6:54:46 PM	PHl3 MFC set to  0.000000
9/26/2010	6:54:46 PM	SiCl4 MFC set to  0.000000
9/26/2010	6:54:46 PM	Bypass solenoid MFC set to  0.000000
9/26/2010	6:54:46 PM	Tube furnace set to 0
9/26/2010	7:03:46 PM	Helium valve closed
9/26/2010	7:03:46 PM	H2 valve closed
9/26/2010	7:03:46 PM	BCl3 valve closed
9/26/2010	7:03:46 PM	PH3 valve closed
9/26/2010	7:03:46 PM	SiCl4 pre valve closed
9/26/2010	7:03:46 PM	SiCl4 post valve closed
9/26/2010	7:03:46 PM	Bubbler valve closed
9/26/2010	7:03:46 PM	Main Vac valve opened
9/26/2010	7:03:46 PM	Bypass valve opened
9/26/2010	7:03:46 PM	Helium MFC set to  0.000000
9/26/2010	7:03:46 PM	H2 MFC set to  0.000000
9/26/2010	7:03:46 PM	BCl3 MFC set to  0.000000
9/26/2010	7:03:46 PM	PHl3 MFC set to  0.000000
9/26/2010	7:03:46 PM	SiCl4 MFC set to  0.000000
9/26/2010	7:03:46 PM	Bypass solenoid MFC set to  0.000000
9/26/2010	7:03:47 PM	Tube furnace set to 0
9/26/2010	7:04:47 PM	H2 valve closed
9/26/2010	7:04:47 PM	BCl3 valve closed
9/26/2010	7:04:47 PM	PH3 valve closed
9/26/2010	7:04:47 PM	SiCl4 pre valve closed
9/26/2010	7:04:47 PM	SiCl4 post valve closed
9/26/2010	7:04:47 PM	Bubbler valve closed
9/26/2010	7:04:47 PM	Helium valve opened
9/26/2010	7:04:47 PM	Main Vac valve opened
9/26/2010	7:04:47 PM	Bypass valve opened
9/26/2010	7:04:47 PM	Helium MFC set to  100.000000
9/26/2010	7:04:47 PM	H2 MFC set to  0.000000
9/26/2010	7:04:47 PM	BCl3 MFC set to  0.000000
9/26/2010	7:04:47 PM	PHl3 MFC set to  0.000000
9/26/2010	7:04:47 PM	SiCl4 MFC set to  0.000000
9/26/2010	7:04:47 PM	Bypass solenoid MFC set to  0.000000
9/26/2010	7:04:47 PM	Tube furnace set to 0
9/26/2010	7:13:47 PM	Helium valve closed
9/26/2010	7:13:47 PM	H2 valve closed
9/26/2010	7:13:47 PM	BCl3 valve closed
9/26/2010	7:13:47 PM	PH3 valve closed
9/26/2010	7:13:47 PM	SiCl4 pre valve closed
9/26/2010	7:13:47 PM	SiCl4 post valve closed
9/26/2010	7:13:47 PM	Bubbler valve closed
9/26/2010	7:13:47 PM	Main Vac valve opened
9/26/2010	7:13:47 PM	Bypass valve opened
9/26/2010	7:13:47 PM	Helium MFC set to  0.000000
9/26/2010	7:13:47 PM	H2 MFC set to  0.000000
9/26/2010	7:13:47 PM	BCl3 MFC set to  0.000000
9/26/2010	7:13:47 PM	PHl3 MFC set to  0.000000
9/26/2010	7:13:47 PM	SiCl4 MFC set to  0.000000
9/26/2010	7:13:47 PM	Bypass solenoid MFC set to  0.000000
9/26/2010	7:13:47 PM	Tube furnace set to 0
9/26/2010	7:13:48 PM	Run finished at 7:13 PM
9/26/2010	8:50:31 PM	Recipe started at 8:50 PM
9/26/2010	8:50:31 PM	Helium valve closed
9/26/2010	8:50:31 PM	BCl3 valve closed
9/26/2010	8:50:31 PM	PH3 valve closed
9/26/2010	8:50:31 PM	SiCl4 pre valve closed
9/26/2010	8:50:31 PM	SiCl4 post valve closed
9/26/2010	8:50:31 PM	Main Vac valve closed
9/26/2010	8:50:31 PM	Bypass valve closed
9/26/2010	8:50:31 PM	Bubbler valve closed
9/26/2010	8:50:31 PM	H2 valve opened
9/26/2010	8:50:31 PM	Helium MFC set to  0.000000
9/26/2010	8:50:31 PM	H2 MFC set to  500.000000
9/26/2010	8:50:31 PM	BCl3 MFC set to  0.000000
9/26/2010	8:50:31 PM	PHl3 MFC set to  0.000000
9/26/2010	8:50:31 PM	SiCl4 MFC set to  0.000000
9/26/2010	8:50:31 PM	Bypass solenoid MFC set to  0.000000
9/26/2010	8:50:31 PM	Tube furnace set to 0
9/26/2010	8:51:51 PM	Helium valve closed
9/26/2010	8:51:51 PM	BCl3 valve closed
9/26/2010	8:51:51 PM	PH3 valve closed
9/26/2010	8:51:51 PM	SiCl4 pre valve closed
9/26/2010	8:51:51 PM	SiCl4 post valve closed
9/26/2010	8:51:51 PM	Main Vac valve closed
9/26/2010	8:51:51 PM	Bypass valve closed
9/26/2010	8:51:51 PM	H2 valve opened
9/26/2010	8:51:51 PM	Bubbler valve opened
9/26/2010	8:51:51 PM	Helium MFC set to  0.000000
9/26/2010	8:51:51 PM	H2 MFC set to  500.000000
9/26/2010	8:51:51 PM	BCl3 MFC set to  0.000000
9/26/2010	8:51:51 PM	PHl3 MFC set to  0.000000
9/26/2010	8:51:51 PM	SiCl4 MFC set to  0.000000
9/26/2010	8:51:51 PM	Bypass solenoid MFC set to  0.000000
9/26/2010	8:51:51 PM	Tube furnace set to 1000
9/26/2010	9:11:51 PM	Helium valve closed
9/26/2010	9:11:51 PM	PH3 valve closed
9/26/2010	9:11:51 PM	Main Vac valve closed
9/26/2010	9:11:51 PM	Bypass valve closed
9/26/2010	9:11:51 PM	H2 valve opened
9/26/2010	9:11:51 PM	BCl3 valve opened
9/26/2010	9:11:51 PM	SiCl4 pre valve opened
9/26/2010	9:11:51 PM	SiCl4 post valve opened
9/26/2010	9:11:51 PM	Bubbler valve opened
9/26/2010	9:11:51 PM	Helium MFC set to  0.000000
9/26/2010	9:11:51 PM	H2 MFC set to  500.000000
9/26/2010	9:11:51 PM	BCl3 MFC set to  5.000000
9/26/2010	9:11:51 PM	PHl3 MFC set to  0.000000
9/26/2010	9:11:51 PM	SiCl4 MFC set to  50.000000
9/26/2010	9:11:51 PM	Bypass solenoid MFC set to  0.000000
9/26/2010	9:11:51 PM	Tube furnace set to 1000
9/26/2010	9:26:51 PM	H2 valve closed
9/26/2010	9:26:51 PM	BCl3 valve closed
9/26/2010	9:26:51 PM	PH3 valve closed
9/26/2010	9:26:51 PM	SiCl4 pre valve closed
9/26/2010	9:26:51 PM	SiCl4 post valve closed
9/26/2010	9:26:51 PM	Main Vac valve closed
9/26/2010	9:26:51 PM	Bypass valve closed
9/26/2010	9:26:51 PM	Helium valve opened
9/26/2010	9:26:51 PM	Bubbler valve opened
9/26/2010	9:26:51 PM	Helium MFC set to  500.000000
9/26/2010	9:26:51 PM	H2 MFC set to  0.000000
9/26/2010	9:26:51 PM	BCl3 MFC set to  0.000000
9/26/2010	9:26:51 PM	PHl3 MFC set to  0.000000
9/26/2010	9:26:51 PM	SiCl4 MFC set to  0.000000
9/26/2010	9:26:51 PM	Bypass solenoid MFC set to  0.000000
9/26/2010	9:26:51 PM	Tube furnace set to 0
9/26/2010	9:46:51 PM	Helium valve closed
9/26/2010	9:46:51 PM	H2 valve closed
9/26/2010	9:46:51 PM	BCl3 valve closed
9/26/2010	9:46:51 PM	PH3 valve closed
9/26/2010	9:46:51 PM	SiCl4 pre valve closed
9/26/2010	9:46:51 PM	SiCl4 post valve closed
9/26/2010	9:46:51 PM	Main Vac valve closed
9/26/2010	9:46:51 PM	Bypass valve closed
9/26/2010	9:46:51 PM	Bubbler valve closed
9/26/2010	9:46:51 PM	Helium MFC set to  0.000000
9/26/2010	9:46:51 PM	H2 MFC set to  0.000000
9/26/2010	9:46:51 PM	BCl3 MFC set to  0.000000
9/26/2010	9:46:51 PM	PHl3 MFC set to  0.000000
9/26/2010	9:46:51 PM	SiCl4 MFC set to  0.000000
9/26/2010	9:46:51 PM	Bypass solenoid MFC set to  0.000000
9/26/2010	9:46:51 PM	Tube furnace set to 0
9/26/2010	9:46:51 PM	Run finished at 9:46 PM
9/26/2010	9:52:52 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
9/26/2010	9:52:52 PM	Recipe started at 9:52 PM
9/26/2010	9:52:52 PM	Helium valve closed
9/26/2010	9:52:52 PM	H2 valve closed
9/26/2010	9:52:52 PM	BCl3 valve closed
9/26/2010	9:52:52 PM	PH3 valve closed
9/26/2010	9:52:52 PM	SiCl4 pre valve closed
9/26/2010	9:52:52 PM	SiCl4 post valve closed
9/26/2010	9:52:52 PM	Main Vac valve closed
9/26/2010	9:52:52 PM	Bubbler valve closed
9/26/2010	9:52:52 PM	Bypass valve opened
9/26/2010	9:52:52 PM	Helium MFC set to  0.000000
9/26/2010	9:52:52 PM	H2 MFC set to  0.000000
9/26/2010	9:52:52 PM	BCl3 MFC set to  0.000000
9/26/2010	9:52:52 PM	PHl3 MFC set to  0.000000
9/26/2010	9:52:52 PM	SiCl4 MFC set to  0.000000
9/26/2010	9:52:52 PM	Bypass solenoid MFC set to  0.000000
9/26/2010	9:52:53 PM	Tube furnace set to 0
9/26/2010	9:53:34 PM	Helium valve closed
9/26/2010	9:53:34 PM	H2 valve closed
9/26/2010	9:53:34 PM	BCl3 valve closed
9/26/2010	9:53:34 PM	PH3 valve closed
9/26/2010	9:53:34 PM	SiCl4 pre valve closed
9/26/2010	9:53:34 PM	SiCl4 post valve closed
9/26/2010	9:53:34 PM	Bubbler valve closed
9/26/2010	9:53:34 PM	Main Vac valve opened
9/26/2010	9:53:34 PM	Bypass valve opened
9/26/2010	9:53:34 PM	Helium MFC set to  0.000000
9/26/2010	9:53:34 PM	H2 MFC set to  0.000000
9/26/2010	9:53:34 PM	BCl3 MFC set to  0.000000
9/26/2010	9:53:34 PM	PHl3 MFC set to  0.000000
9/26/2010	9:53:34 PM	SiCl4 MFC set to  0.000000
9/26/2010	9:53:34 PM	Bypass solenoid MFC set to  0.000000
9/26/2010	9:53:34 PM	Tube furnace set to 0
9/26/2010	9:53:34 PM	Run finished at 9:53 PM
9/26/2010	9:53:34 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
